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Design and Optimization of an Electro Thermally Actuated Micro Gripper

Rajalakshmi PR , Rathna Kannan K , Kalaiarasi AR , Hosimin Thilagar S

A MEMS electro-thermal microgripper has been designed and discussed in this paper. The electro thermally actuated gripper consists of “hot-and-cold-arm” actuators. The micro-grippers are used to maneuver small delicate objects with nanometer scale precision and accuracy. Design parameters strongly influencing the performance of the gripper such as length of the hot arm, length and shape of the cold arm has been considered in order to optimize the performance. The gripper has a thickness of 25m. Simulation of the device has been done using the COMSOL Multiphysics software.