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Design and Analysis of Double folded beam MEMS accelerometer

Venkatesh.M, Krushnasamy.V.S

This paper presents the design of double folded beam MEMS accelerometer and also presents the study on stress and displacement of proof mass and beams. The optimized parameters of beam length and proof mass width which minimize the die area obtained through Artificial Bee Colony (ABC) algorithm are used to find out the motion resolution and maximum acceleration survival. Double folded beam accelerometer is designed in COMSOL multiphysics and the constraint values are compared with the theoretical values.